TSMC announced on Wednesday morning that no main machines, including all their extreme ultraviolet lithography equipment, were damaged.
Taiwan experienced its strongest earthquake in 25 years yesterday. While 7.2 at its epicenter, the magnitude was only 5 in Hsinchu, Longtan, and Zhunan Science Parks and a 4 in Taichung and Tainan Science Parks.
TSMC conducts regular safety drills to remain prepared at all times. On the day of the quake, several factory areas were evacuated in accordance with company safety and preventative measures. A few pieces of equipment were damaged, affecting some lines of production. However, 10 hours after the quake, all relevant wafer fab equipment was functioning at a recovery rate of over 70%. Personnel were allowed to return to work once it was safe to do so.